PMMA_Linewidth_vs_SPL_Dose.PNG
Summary
Description PMMA Linewidth vs SPL Dose.PNG |
English:
Ref: K Wilder
et al.
, J. Vac. Sci. Tech. B 16, 3864 (1998).
|
Date | 13 September 2010 (original upload date) |
Source | Own work |
Author | User:Guiding light |
Scanning probe lithography (SPL) performed in air with low-energy electrons (40-60 V bias negative with respect to sample), emitted from a titanium coated tip.
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Date/Time | Dimensions | User | Comment |
---|---|---|---|
08:29, 13 September 2010 | 681 × 464 (13,321 bytes) | w:en:Guiding light ( talk | contribs ) | (Ref: K Wilder ''et al.'', J. Vac. Sci. Tech. B 16, 3864 (1998). Scanning probe lithography (SPL) performed in air with low-energy electrons (40-60 V bias negative with respect to sample), emitted from a titanium coated tip.) |