H_and_V_shadowing_across_EUV_slit.png
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Summary
| Description |
English:
Horizontal and vertical lines exhibit different shadowing across the slit of an EUV scanner. Vertical lines have less severe but a wider range of shadowing than horizontal lines.
[1]
The smaller pitch has worse shadowing in all cases.
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| Date | |
| Source | Own work |
| Author | Guiding light |
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