Tetrakis(trimethylsilyloxy)silane

Tetrakis(trimethylsilyloxy)silane

Tetrakis(trimethylsilyloxy)silane

Chemical compound


Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound with the formula Si[OSi(CH3)3]4. This colourless liquid is used as a reagent in organic synthesis.[2]

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Application

TTMS can be used for thin film coating with a nanostructured silicon dioxide prepared by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure.[3]


References

  1. "TETRAKIS(TRIMETHYLSILOXY)SILANE - 3555-47-3".
  2. Fleming, I (2002). Science of Synthesis: Houben-Weyl Methods of Molecular Transformations. Stuttgart: Georg Thieme Verlag. p. 1060. ISBN 3-13-112171-8.
  3. Schäfer, J; Hnilica, J; Sperka, J; Quade, A; Kudrle, V; Foest, R; Vodak, J; Zajickova, L (2016). "Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure". Surface & Coatings Technology. 295 (295): 112–118. doi:10.1016/j.surfcoat.2015.09.047.

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